Cleanroom
If you wish to be trained on cleanroom equipment, please contact: Maya Narayanan Kutty.
Tool ID |
Tool Manufacturer / Name |
Comments |
|---|---|---|
| AB01 | Local Mfg N/A Acid Bench | |
| AB02 | Local Mfg N/A Acid Bench | |
| ALPS01 | Tencor Alpha Step 500 | |
| BB01 | Local Mfg N/A Base Bench | |
| BB02 | Various N/A Gold Electroplating | |
| BB03 | Local Mfg N/A Developer Bench | |
| CVD01 | SAMCO PD-10 PECVD | TIP |
| ELP01 | Gaertner L125B Ellipsometer | |
| EVAP01 | Airco Temescal N/A Metal I Evaporator | TIP |
| EVAP02 | Telemark N/A Metal II Evaporator | TIP |
| EVAP03 | CHA Mark 40 Dielectric Evaporator | TIP |
| EVAP04 | Sharon Vacuum N/A Thernal Evaporator | TIP |
| FRN01 | Lindberg S5357-BDS Silicon Oxidation Furnace | TIP |
| FRN02 | Lindberg S5359-BDS Silicon Diffusion Furnace | TIP |
| FRN05 | Expert Semiconductor Expertech III-V Steam Oxidation Furnace | |
| HTP01 | Dataplate 720 Series Hot Plate | |
| HTP02 | Dataplate 720 Series Hot Plate | |
| HTP03 | Dataplate 720 Series Hot Plate | |
| HTP04 | Dataplate 720 Series Hot Plate | |
| LAM01 | LAM Planar Etcher #01 | |
| LAM02 | LAM Planar Etcher #02 | |
| MA01 | Karl Suss MJ83 Mask Aligner | |
| MA03 | Karl Suss MJ83 Mask Aligner | |
| MA04 | Karl Suss MJ83 Mask Aligner | |
| MIC01 | Leitz Ergolutz Microscope | |
| MIC03 | Nikon UM-2 Microscope | |
| OVN01 | Blue M OV-8A Oven | |
| OVN02 | Blue M OV-8A Oven | |
| OVN03 | Blue M OV-472A-3 Oven | |
| OVN04 | Blue M OV-472A-4 Oven | |
| PE01 | PlasmaTherm/Unaxis ICP | TIP |
| PE02 | Technics PEII-A Planar Etcher | |
| PE04 | Plasmaline Asher Planar Etcher | |
| PE05 | Plasma Technology Plasmaline | TIP |
| RTA01 | Modular Process RTA | |
| RTA02 | Process Products 1150 RTA | |
| SB01 | Solvent Bench | |
| SB02 | Solvent Bench | |
| SB03 | Solvent Bench | |
| SPIN01 | Headway Research Spinner | |
| SPIN02 | Headway Research Spinner | |
| STPR01 | Stepper |
|
Manuf. |
Photoresist |
Tone |
Exposure Wavelengths (in nm) |
Reference |
Aspect Ratio / Resolution |
Primary Uses / Applications |
SDS |
|---|---|---|---|---|---|---|---|
| AZ | 5206-E | Positive | 1.0 - 2.0μm | i-,h-line | High resolution | ||
| AZ | 5214-E | Positive | 1.0-2.0μm | i-,h-line | High resolution | ||
| AZ | 5214-EIR | Negative | 1.0-2.0μm | i-,h-line | High resolution | ||
| AZ | nLOF 2020 | Negative | 1.5-4.5μm | i-line | Lift off | ||
| AZ | nLOF 2035 | Negative | 3.0-6.0μm | i-line | Lift off | ||
| AZ | P4210 | Positive | 1.6-2.4μm | h,g-line | 2 to 1 | ||
| AZ | P4330-RS | Positive | 2.5-3.8μm | h,g-line | 2 to 1 | ||
| AZ | P4620 | Positive | 4.7-7.1μm | h,g-line | 2 to 1 | ||
| DOW | SPR 220-3.0 | Positive | 2.0-4.5μm | i-line, broadband | General Purpose | ||
| DOW | SPR 510A | Positive | .75-1.15μm | i-line | |||
| DOW | Ultra-I 123-0.8 | Positive | .09-.5μm | i-line | General Purpose |
