Cleanroom

Cleanroom Diagram

If you wish to be trained on cleanroom equipment contact: Beth Fuchs (505-272-7844)

 

Tool ID

Tool Manufacturer / Name

Comments

AB01 Local Mfg N/A Acid Bench
AB02 Local Mfg N/A Acid Bench
ALPS01 Tencor Alpha Step 500
BB01 Local Mfg N/A Base Bench
BB02 Various N/A Gold Electroplating
BB03 Local Mfg N/A Developer Bench
CVD01 SAMCO PD-10 PECVD TIP
ELP01 Gaertner L125B Ellipsometer  
EVAP01 Airco Temescal N/A Metal I Evaporator TIP
EVAP02 Telemark N/A Metal II Evaporator TIP
EVAP03 CHA Mark 40 Dielectric Evaporator TIP
EVAP04 Sharon Vacuum N/A Thernal Evaporator TIP
FRN01 Lindberg S5357-BDS Silicon Oxidation Furnace TIP
FRN02 Lindberg S5359-BDS Silicon Diffusion Furnace TIP
FRN05 Expert Semiconductor Expertech III-V Steam Oxidation Furnace  
HTP01 Dataplate 720 Series Hot Plate
HTP02 Dataplate 720 Series Hot Plate
HTP03 Dataplate 720 Series Hot Plate
HTP04 Dataplate 720 Series Hot Plate
LAM01 LAM Planar Etcher #01
LAM02 LAM Planar Etcher #02
MA01 Karl Suss MJ83 Mask Aligner
MA03 Karl Suss MJ83 Mask Aligner
MA04 Karl Suss MJ83 Mask Aligner
MIC01 Leitz Ergolutz Microscope
MIC03 Nikon UM-2 Microscope
OVN01 Blue M OV-8A Oven
OVN02 Blue M OV-8A Oven
OVN03 Blue M OV-472A-3 Oven
OVN04 Blue M OV-472A-4 Oven
PE01 PlasmaTherm/Unaxis ICP TIP
PE02 Technics PEII-A Planar Etcher  
PE04 Plasmaline Asher Planar Etcher
PE05 Plasma Technology Plasmaline TIP
RTA01 Modular Process RTA
RTA02 Process Products 1150 RTA
SB01 Solvent Bench
SB02 Solvent Bench
SB03 Solvent Bench
SPIN01 Headway Research Spinner
SPIN02 Headway Research Spinner  
STPR01 Stepper

 

Manuf.

Photoresist

Tone

Exposure Wavelengths (in nm)

Reference

Aspect Ratio / Resolution

Primary Uses / Applications

SDS
AZ 5214-E Positive 1.0-2.0μm i-,h-line High resolution   PDF
AZ 5214-EIR Negative 1.0-2.0μm i-,h-line High resolution   PDF
AZ nLOF 2020 Negative 1.5-4.5μm i-line   Lift off PDF
AZ nLOF 2035 Negative 3.0-6.0μm i-line   Lift off PDF
AZ P4210 Positive 1.6-2.4μm h,g-line 2 to 1   PDF
AZ P4330-RS Positive 2.5-3.8μm h,g-line 2 to 1   PDF
AZ P4620 Positive 4.7-7.1μm h,g-line 2 to 1   PDF
DOW SPR 220-3.0 Positive 2.0-4.5μm i-line, broadband   General Purpose PDF
DOW SPR 510A Positive .75-1.15μm i-line     PDF
DOW Ultra-I 123-0.8 Positive .09-.5μm i-line   General Purpose PDF


Training Videos for Equipment

MA06 Mask Aligner