Get Qualified on CHTM Equipment
Before operating CHTM equipment you must be qualified in its use. Below you will find documents to register your personal information, give you an overview of Cleanroom orientation, and learn correct operating procedures for the various pieces of equipment you will be using. These are PDF Documents and open in a new window.
- CHTM Cleanroom Information Form (Record of your personal information; necessary for Cleanroom access)
- Clean Room Orientation Notes: Overview and General Safety
- Basic ICP Operating Procedures
- CHA Mark 40 Evaporator for Dielectric Films Operating Manual
- Karl Suss Scriber Operating Instructions
- Metal Evaporator Operating Procedures
- Photolithography Bay Operating Procedure
- Tegal Plasmaline Plasma Etch Operating Procedures
- SAMCO PECVD System Operating Procedures
